Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer
نویسندگان
چکیده
منابع مشابه
Design and fabrication of three axes accelerometer
Technology can provide safety in physical practices and improving the performance of these activities, so manufacturing of equipments for these purposes has been considered widely. The aim of the present paper was design and fabrication of three-axis accelerometer. hree acceleration sensors, three gyroscopes for angular velocity measurement, a microcontroller for converting analog data to ...
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We report the utilization of key design parameters to simulate, batch-fabricate and evaluate first-generation single crystal 6H-SiC piezoresistive accelerometers for extreme impact, high electromagnetic fields (EM) and high temperature applications. The results from finite element analysis (FEA) of the selected design models were compared to evaluated prototypes. While FEA results predicted saf...
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Using a single maskless postprocessing step we have developed an accelerometer in a standard commercial CMOS process capable of a sensitive axis parallel or perpendicular to the die surface. Our postprocess is realized using xenon difluoride (XeF2) as a bulk etchant. The combination of this etchant and the standard CMOS process allows realization of cantilevers with piezoresistive sensors in al...
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This paper presents a monolithic three-axis accelerometer with wafer-level package by CMOS MEMS process. The compositions of the microstructure are selected from CMOS layers in order to suppress the in-plane and out-of-plane bending deflection caused by the residual stresses in multiple layers. A switched-capacitor sensing circuit with a trimming mechanism is used to amplify the capacitive sign...
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2017
ISSN: 2213-9621
DOI: 10.1186/s40486-016-0041-7